TY - Jour A2 - Siciliano，P. Au - Rastrello，F. Au - Placidi，P. Au - Abbati，L. Au - Scorzoni，A. Au - Cozzani，E. Au - Elmi，I. Au - Zampolli，S。AU - Cardinali, G. C. PY - 2010 DA - 2010/10/25 TI - Thermal Transient Measurements of an Ultra-Low-Power MOX Sensor SP - 493765 VL - 2010 AB - This paper describes a system for the simultaneous dynamic control and thermal characterization of the heating of an Ultra Low Power (ULP) micromachined sensor. A Pulse Width Modulated (PWM) powering system has been realized using a microcontroller to characterize the thermal behavior of a device. Objectives of the research were to analyze the relation between the time period and duty cycle of the PWM signal and the operating temperature of such ULP micromachined systems, to observe the thermal time constants of the device during the heating phase and to measure the total thermal conductance. Constant target heater resistance experiments highlighted that an approximately constant heater temperature at regime can only be obtained if the time period of the heating signal is smaller than 50  μ. s。恒定功率实验定量显示热时间常数 τ. 在加热期间减少在2.3ms至2ms的范围内，随着温度升高的函数 δ. T. 在环境和工作温度之间。此外，我们计算了总热敏度。最后，通过保证在内部的受控温度的标准偏差来评估实验结果的可重复性 ± 5. .5 ∘ C在最坏情况下。SN - 1687-725X UR - https://doi.org/10.1155/2010/493765 do - 10.1155 / 2010/493765 jf - 传感器Pb - Hindwi Publishing CorporationKW - ER -