TY - JOUR AU - Tellier, C. R. AU - Huve, G. AU - Leblois, T. G. PY - 2004 DA - 1900/01/01 TI - Anisotropic Chemical Etching of III—V Crystals Dissolution Slowness Surface and Application to GaAs SP - 871265 VL - 27 AB - SN - 0882-7516 UR - https://doi.org/10.1080/08827510310001616858 DO - 10.1080/08827510310001616858 JF - Active and Passive Electronic Components PB - Hindawi Publishing Corporation KW - ER -